Global-in-time Spectral Duhamel-Picard Method for Post-Exposure Bake Simulation and Physics-Informed Neural Operators for EUV Lithography
We present a global-in-time spectral Duhamel-Picard method with polynomial expansions for post-exposure bake (PEB) simulation. The coupled acid-quencher reaction-diffusion equations are reformulated as nonlinear Volterra integral equations using the Duhamel principle. Full trajectories are represented by finite polynomial expansions, with temporal coefficient fields determined over the bake interval by Anderson-accelerated Picard iteration, thereby avoiding sequential time marching. In 3-D PEB simulations, we employ Chebyshev and Legendre temporal bases while evaluating the Duhamel integrals using the corresponding Gaussian quadrature rules. We demonstrate that the proposed method simulat...
| Authors | Doyun Kim, Mircea Dusa, Werner Gilijns et al. |
|---|---|
| Primary category | physics.comp-ph |
| Published | 13 October 2026 |
| Last updated at source | 13 October 2026 |
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