LithoDreamer: A Physics-Informed World Model for Multi-Stage Computational Lithography
As semiconductor technology nodes scale, computational lithography is essential for ensuring yield and performance. However, lithography is a continuous physical process involving mask optimization, optical imaging, resist exposure, and development, which existing models fail to capture. To overcome this limitation, we present LithoDreamer, the first physics-informed World Model (WM) framework for computational lithography, which formulates the ``Layout-Mask-Resist Image-After Development Image (ADI)'' pipeline as a decision-driven multi-step evolution system. LithoDreamer captures feature changes between adjacent states to model stage-specific physics-informed latent spaces, in which it ...
| Authors | Yuqi Jiang, Yumeng Liu, Zimu Li et al. |
|---|---|
| Primary category | cs.AI |
| Published | 25 June 2026 |
| Last updated at source | 25 June 2026 |
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