SemiFA: An Agentic Multi-Modal Framework for Autonomous Semiconductor Failure Analysis Report Generation
Semiconductor failure analysis (FA) requires engineers to examine inspection images, correlate equipment telemetry, consult historical defect records, and write structured reports, a process that can consume several hours of expert time per case. We present SemiFA, an agentic multi-modal framework that autonomously generates structured FA reports from semiconductor inspection images in under one minute. SemiFA decomposes FA into a four-agent LangGraph pipeline: a DefectDescriber that classifies and narrates defect morphology using DINOv2 and LLaVA-1.6, a RootCauseAnalyzer that fuses SECS/GEM equipment telemetry with historically similar defects retrieved from a Qdrant vector database, a S...
| Authors | Shivam Chand Kaushik |
|---|---|
| Primary category | cs.CV |
| Published | 14 April 2026 |
| Last updated at source | 14 April 2026 |
Silytics shows public metadata from arXiv and links to the original. Information may be incomplete or out of date. Last refreshed 17 October 2026. Licenses and terms of the original apply to the work itself. Not financial, legal or professional advice.