Multi-Period Texture Contrast Enhancement for Low-Contrast Wafer Defect Detection and Segmentation

Wafer defect segmentation is pivotal for semiconductor yield optimization yet remains challenged by the intrinsic conflict between microscale anomalies and highly periodic, overwhelming background textures. Existing deep learning paradigms often falter due to feature dilution during downsampling and the lack of explicit mechanisms to disentangle low-contrast defects from process-induced noise. To transcend these limitations, we propose TexWDS, a texture-aware framework that harmonizes multi-scale feature retention with frequency-domain perturbation modeling. Our methodology incorporates three strategic innovations: (1) A Multi-scale Receptive Field Reweighting strategy is introduced to mi...

<iframe src="https://silytics.si/embed/item/bcb539c8-c530-4b1b-8430-a1a183bf60a2" width="420" height="190" style="border:0" loading="lazy" title="Silytics entry"></iframe>

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